Biblio

This paper presents a new class of high-performance permanent micro-magnets based on the controlled assembly of cobalt nanorods for the electromagnetic transduction of MEMS. Micromagnets are fabricated using a low temperature fabrication process that yields a dense material exhibiting high coercive field and remanence to saturation magnetization ratio. The cartography of the magnetic induction produced by the sub-millimeter size magnets was obtained using a scanning Hall effect micro-probe microscope. Silicon microcantilevers placed in the vicinity of these magnets were successfully actuated using the Lorentz force with low currents. The good signal to noise ratio measured at resonance demonstrates the potentiality of these nanostructured micro-magnets.

In order to investigate the relationship and effect on the performance of magnetic modulator among applied DC current, excitation source, excitation loop current, sensitivity and induced voltage of detecting winding, this paper measured initial permeability, maximum permeability, saturation magnetic induction intensity, remanent magnetic induction intensity, coercivity, saturated magnetic field intensity, magnetization curve, permeability curve and hysteresis loop of main core 1J85 permalloy of magnetic modulator based on ballistic method. On this foundation, employ curve fitting tool of MATLAB; adopt multiple regression method to comprehensively compare and analyze the sum of squares due to error (SSE), coefficient of determination (R-square), degree-of-freedom adjusted coefficient of determination (Adjusted R-square), and root mean squared error (RMSE) of fitting results. Finally, establish B-H curve mathematical model based on the sum of arc-hyperbolic sine function and polynomial.