Biblio

This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young’s modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.

We report on the significant enhancement of perpendicular magnetic anisotropy of Ni/NiO multilayers after mild annealing up to 90 min at 250 °C. Transmission electron microscopy shows that after annealing, a partial crystallization of the initially amorphous NiO layers occurs. This turns out to be the source of the anisotropy enhancement. Magnetic measurements reveal that even multilayers with Ni layers as thick as 7 nm, which in the as-deposited state showed inplane anisotropy with square hysteresis loops, show reduced in-plane remanence after thermal treatment. Hysteresis loops recorded with the field in the normal-to-film-plane direction provide evidence for perpendicular magnetic anisotropy with up and down magnetic domains at remanence. A plot of effective uniaxial magnetic anisotropy constant times individual Ni layer thickness as a function of individual Ni layer thickness shows a large change in the slope of the data attributed to a drastic change of volume anisotropy. Surface anisotropy showed a small decrease because of some layer roughening introduced by annealing.

We demonstrate how a unique nanomodulation within a continuous ferromagnetic film can induce magnetic dipoles at predefined, submicrometer scale locations, which can tune the global magnetic properties of the film due to dipole-dipole interactions. Arrays of tunable magnetic dipoles are generated with in-plane and out-of-plane directions, which can be rotated in-plane within the three-dimensional (3-D) modulated structure of a continuous film. In-plane magnetic dipole rotation enables a methodology to control overall magnetic properties of a ferromagnetic thin film. Formation of magnetic dipoles and their tunability were studied in detail by magnetic force microscopy, high-resolution magnetic measurements, and micromagnetic simulation of a nanomodulated Ni45Fe55 alloy film. A pattern larger than a single magnetic domain would normally form a vortex in the remanent state. However, here the unique 3-D nanostructure prevents vortex formation due to the competition between in-plane and out-of-plane dipole-dipole interaction giving rise to a metastable state. Experimentally, at zero remanence, the magnetization goes through a transformation from a metastable to a stable state, where the dipole-dipole interaction depends on their geometrical arrangement. Thus, the magnetic properties of the continuous film can be varied by the proposed pattern geometry. A detail analytical study of the dipolar energy for the system agrees well with the experimental and simulated results.