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2020-01-13
Zhao, Xuanyi, Cassella, Cristian.  2019.  On the Coupling Coefficient of ScyAl1-yN-based Piezoelectric Acoustic Resonators. 2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC). :1–4.
This work investigates the electromechanical coupling coefficient (kt2) attained by two available piezoelectric acoustic resonator technologies relying on Aluminum Scandium Nitride (ScyAl1-yN) films to operate. In particular, by using a theoretical approach, we extracted the maximum kt2-value attainable, for different scandium-doping concentrations (from 0% to 40%), by Film-Bulk-Acoustic-Resonators (FBARs) and Cross-Sectional-Lamé-Mode Resonators (CLMRs). For the first time, we show how the use of higher scandium doping concentrations can render the kt2 of CLMRs higher (35%) than the one attained by FBARs (28%). Such a unique feature renders CLMRs as ideal candidates to form lithographically defined resonators and filters for next-generation wideband radiofrequency (RF) front-ends.