Biblio

This paper is the first to investigate the long-term stability of Surface Acoustic Wave Gyroscopes (SAWG) using an ovenized control system. Monolithic integration of a MEMS heater adjacent to SAW devices on Lithium Niobate over insulator substrate (LNOI) tightly couples frequency-based temperature detection with heating for temperature and frequency stabilization. This first prototype demonstrates the ability to minimize the temperature variations of the SAWG to below ±10 μK and stabilize the SAWG resonance frequency to ±0.2 ppm. This approach thus eliminates the thermal drift in a SAWG and enables the development of a new generation of MEMS-based gyroscopes with long-term stability.

This paper proposes a method to synthesis acoustic wave (AW) filters with Chebyshev response automatically. Meanwhile, each AW resonator used to design the filter can be easily fabricated on the same piezoelectric substrate. The method is based on an optimization algorithm with constraints for constant electromechanical coupling coefficient ( kt2) to minimize the defined cost function. Finally, the experimental result for a surface acoustic wave (SAW) filter of global positioning system (GPS) frequency band based on the 42° lithium tantalate (LiTaO3) substrate validates the simulation results. The designed filter shows insertion loss (IL) and return loss (RL) better than 2.5dB and 18dB respectively in the pass-band, and out-band reflection larger than 30dB.