Biblio

Surface acoustic wave devices based on LiNbO3/interlayer/substrate layered structure have attracted great attention due to the high electromechanical coupling coefficient (K2) of LiNbO3 and the energy confinement effect of the layered structure. In this study, 30° YX-LiNbO3 (LN)/SiO2/Si multilayered structure, which can excited shear-horizontal surface acoustic wave (SH-SAW) with high K2, was proposed. The optimized orientation of LiNbO3 was verified by the effective permittivity method based on the stiffness matrix. The phase velocity, K2 value, and temperature coefficient of frequency (TCF) of the SH-SAW were calculated as a function of the LiNbO3 thickness at different thicknesses of the SiO2 in 30° YX-LiNbO3/SiO2/Si multilayer structure by finite element method (FEM). The results show that the optimized LiNbO3 thickness is 0.1 and the optimized SiO2 thickness is 0.2λ. The optimized Al electrode thickness and metallization ratio are 0.07 and 0.4, respectively. The K2 of the SH-SAW is 29.89%, the corresponding phase velocity is 3624.00 m/s and TCF is about 10 ppm/°C with the optimized IDT/30° YX-LiNbO3/SiO2/Si layered structure.

This paper proposes a method to synthesis acoustic wave (AW) filters with Chebyshev response automatically. Meanwhile, each AW resonator used to design the filter can be easily fabricated on the same piezoelectric substrate. The method is based on an optimization algorithm with constraints for constant electromechanical coupling coefficient ( kt2) to minimize the defined cost function. Finally, the experimental result for a surface acoustic wave (SAW) filter of global positioning system (GPS) frequency band based on the 42° lithium tantalate (LiTaO3) substrate validates the simulation results. The designed filter shows insertion loss (IL) and return loss (RL) better than 2.5dB and 18dB respectively in the pass-band, and out-band reflection larger than 30dB.