Biblio
Filters: Author is Rudolph, M. [Clear All Filters]
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2022. Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability. 2022 IEEE International Memory Workshop (IMW). :1–4.
Study on the effect of nanosecond laser anneal (NLA) induced crystallization of ferroelectric (FE) Si-doped hafnium oxide (HSO) material is reported. The laser energy density (0.3 J/cm2 to 1.3 J/cm2) and pulse count (1.0 to 30) variations are explored as pathways for the HSO based metal-ferroelectric-metal (MFM) capacitors. The increase in energy density shows transition toward ferroelectric film crystallization monitored by the remanent polarization (2Pr) and coercive field (2Ec). The NLA conditions show maximum 2Pr (\$\textbackslashsim 24\textbackslash \textbackslashmu\textbackslashmathrmC/\textbackslashtextcmˆ2\$) comparable to the values obtained from reference rapid thermal processing (RTP). Reliability dependence in terms of fatigue (107 cycles) of MFMs on NLA versus RTP crystallization anneal is highlighted. The NLA based MFMs shows improved fatigue cycling at high fields for the low energy densities compared to an RTP anneal. The maximum fatigue cycles to breakdown shows a characteristic dependence on the laser energy density and pulse count. Leakage current and dielectric breakdown of NLA based MFMs at the transition of amorphous to crystalline film state is reported. The role of NLA based anneal on ferroelectric film crystallization and MFM stack reliability is reported in reference with conventional RTP based anneal.
ISSN: 2573-7503
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2016. A Framework for Generating User-and Domain-Tailored Security Policy Editors. 2016 IEEE 24th International Requirements Engineering Conference Workshops (REW). :56–61.
In modern enterprises, incorrect or inconsistent security policies can lead to massive damage, e.g., through unintended data leakage. As policy authors have different skills and background knowledge, usable policy editors have to be tailored to the author's individual needs and to the corresponding application domain. However, the development of individual policy editors and the customization of existing ones is an effort consuming task. In this paper, we present a framework for generating tailored policy editors. In order to empower user-friendly and less error-prone specification of security policies, the framework supports multiple platforms, policy languages, and specification paradigms.