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2021. An Acoustic Resonator with Electromechanical Coupling of 16% and Low TCF at 5.4 GHz. 2021 IEEE International Ultrasonics Symposium (IUS). :1–4.
In this paper, an acoustic resonator with frequency \textbackslashtextgreater 5 GHz is designed, implemented, and measured with electromechanical coupling exceeding 15% and low temperature dependence compared to conventional Lamb-wave resonators. The acoustic resonator is optimized for the S4 mode Lamb waves in a bi-morph composed of Lithium Niobate and Silicon Dioxide. The resonator optimization is based on adjusting the thickness of different materials in the bimorph to maximize the coupling and minimize temperature dependence simultaneously. The achieved specifications are adequate for 5G sub-6 GHz frequency band n46 in addition to Wi-Fi new bands between 5 and 6 GHz.