Biblio

This paper presents a new micro linear actuator design. The North-South (NS) permanent magnet array configuration is assembled as the mobile part. The fixed part is designed to two-phase planar coils with no crossings avoiding interferences between overlapped conductors. The analytical calculation of the permanent magnet array verifies the feasibility of the finite element simulation. And then electromagnetic optimizations based on simulation to maximize the average thrust and minimize thrust ripple. In order to deal with millimeter level structure design, a microfabrication approach is adopted to process the new micro linear actuator in silicon material. The new micro linear actuator is able to perform millimeter level displacement strokes along a single axis in the horizontal plane. The experimental results demonstrate that the new micro linear actuator is capable of delivering variable strokes up to 5 mm with a precision error of 30 μm in position closed loop control and realizes the maximum velocity of 26.62mm/s with maximum error of 4.92%.

This paper reported the polymer coated film bulk acoustic resonators (FBAR) as a sensitive detector in micro chromatography for the detection of trace chemical warfare agents (CWA) simulants. The FBAR sensor was enclosed in a microfluidic channel and then coupled with microfabricated separation column. The subsequent chromatographic analysis successfully demonstrated the detection of parts per billion (ppb) concentrations of chemical warfare agents (CWAs) simulants in a five components gas mixture. This work represented an important step toward the realization of FBAR based handheld micro chromatography for CWA detection in the field.

The evolution of the microelectronics manufacturing industry is characterized by increased complexity, analysis, integration, distribution, data sharing and collaboration, all of which is enabled by the big data explosion. This evolution affords a number of opportunities in improved productivity and quality, and reduced cost, however it also brings with it a number of risks associated with maintaining security of data systems. The International Roadmap for Devices and System Factory Integration International Focus Team (IRDS FI IFT) determined that a security technology roadmap for the industry is needed to better understand the needs, challenges and potential solutions for security in the microelectronics industry and its supply chain. As a first step in providing this roadmap, the IFT conducted a security survey, soliciting input from users, suppliers and OEMs. Preliminary results indicate that data partitioning with IP protection is the number one topic of concern, with the need for industry-wide standards as the second most important topic. Further, the "fear" of security breach is considered to be a significant hindrance to Advanced Process Control efforts as well as use of cloud-based solutions. The IRDS FI IFT will endeavor to provide components of a security roadmap for the industry in the 2018 FI chapter, leveraging the output of the survey effort combined with follow-up discussions with users and consultations with experts.

Cryptographic applications need high-quality random number generator (RNG) for strong security and privacy measures. This paper presents RNG based on a hydrogen gas sensor that is fabricated by using microfabrication techniques. The proposed approach extracts the thermal noise information as an entropy source from the gas sensor that is non-deterministic during its operation and using hash function SHA-256 as post processing. This non-deterministic noise is then processed to acquire a random number set fulfilling the NIST 800-22 statistical randomness test suite and it demonstrates that a gas sensor based RNG can provide high-quality random numbers. Secure data transfer is possible by having this method directly without any other hardware where hydrogen gas sensor needs to be used such as petrochemical field, fuel cells, and nuclear reactors.