| Title | Solidly Mounted Resonators Based on ZnO/SiO2 Acoustic Reflectors and Their Performance After High-temperature Exposure |
| Publication Type | Conference Paper |
| Year of Publication | 2022 |
| Authors | Cejas, José Manuel Carmona, Mirea, Teona, Clement, Marta, Olivares, Jimena |
| Conference Name | 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) |
| Date Published | apr |
| Keywords | acoustic coupling, Acoustic measurements, Acoustic reflectors, Acoustics, AlN, BAW, Bragg mirrors, dielectric materials, Dielectric measurement, electrical insulators, Frequency measurement, Frequency response, Human Behavior, II-VI semiconductor materials, Piezoelectric devices, pubcrawl, resilience, Resiliency, Scalability, SMRs, Zinc oxide, ZnO |
| Abstract | Solidly mounted resonators (SMRs) built on dielectric acoustic reflectors can save several fabrication steps as well as avoid undesired parasitic effects when exciting extended electrodes via capacitive coupling. In this work we manufacture and measure the frequency response of AlN-based SMRs built on 7-layer ZnO/SiO2 acoustic reflectors with SiO2 working as low impedance material and ZnO as high impedance material. After applying a 700degC treatment, their frequency response is measured again and compared with the pre-treatment measurements. |
| DOI | 10.1109/EFTF/IFCS54560.2022.9850963 |
| Citation Key | cejas_solidly_2022 |
Solidly Mounted Resonators Based on ZnO/SiO2 Acoustic Reflectors and Their Performance After High-temperature Exposure