Visible to the public Biblio

Filters: Author is Schulz-Walsemann, Arne-Veit  [Clear All Filters]
2020-02-24
Lisec, Thomas, Bodduluri, Mani Teja, Schulz-Walsemann, Arne-Veit, Blohm, Lars, Pieper, Isa, Gu-Stoppel, Shanshan, Niekiel, Florian, Lofink, Fabian, Wagner, Bernhard.  2019.  Integrated High Power Micro Magnets for MEMS Sensors and Actuators. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems Eurosensors XXXIII (TRANSDUCERS EUROSENSORS XXXIII). :1768–1771.
Back-end-of-line compatible integration of NdFeB-based micro magnets onto 8 inch Si substrates is presented. Substrate conditioning procedures to enable further processing in a cleanroom environment are discussed. It is shown that permanent magnetic structures with lateral dimensions between 25μm and 2000μm and a depth up to 500μm can be fabricated reliably and reproducibly with a remanent magnetization of 340mT at a standard deviation as low as 5% over the substrate. To illustrate post-processing capabilities, the fabrication of micro magnet arrangements embedded in silicon frames is described.