Biblio

Emerging next generation wireless communication devices call for high-performance filters that operate at 3-10 GHz frequency range and offer low loss, small form factor, wide bandwidth and steep skirts. Bulk and surface acoustic wave devices have been long used in the RF front-end for filtering applications, however their operation frequencies are mostly below 2.6 GHz band. To scale up the frequency of the filters, the thickness of the piezoelectric material needs to be reduced to sub-micron ranges. One of the challenges of such scaling is maintaining high electromechanical coupling as the film thickness decreases, which in turn, determines the filter bandwidth.Aluminum Nitride (AlN) - popular in today's film bulk acoustic resonators (FBARs) and mostly deposited using sputtering techniques-shows degraded crystal quality and poor electromechanical coupling when the thickness of AlN film is smaller than 1 μm.In this work, we propose using high-quality single-crystalline AlN and Scandium (Sc)-doped AlN epi-layers grown on Si substrates, wherein high crystal quality is maintained for ultra-thin films of only 400 nm thickness. Experimental results verify improved kt2 for 3-10 GHz resonators, with quality factors of the order of 250 and kt2 values of up to 5%based on bulk acoustic wave resonators. The experimental results suggest that single-crystal Sc-AlN is a great material candidate for 5G resonators and filters.

In smart factories and smart homes, devices such as smart sensors are connected to the Internet. Independent of the context in which such a smart sensor is deployed, the possibility to change its configuration parameters in a secure way is essential. Existing solutions do provide only minimal security or do not allow to transfer arbitrary configuration data. In this paper, we present an NFC- and QR-code based configuration interface for smart sensors which improves the security and practicability of the configuration altering process while introducing as little overhead as possible. We present a protocol for configuration as well as a hardware extension including a dedicated security controller (SC) for smart sensors. For customers, no additional hardware other than a commercially available smartphone will be necessary which makes the proposed approach highly applicable for smart factory and smart home contexts alike.