Biblio
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2022. A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS). :309–310.
This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young’s modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.
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2019. Integrated High Power Micro Magnets for MEMS Sensors and Actuators. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems Eurosensors XXXIII (TRANSDUCERS EUROSENSORS XXXIII). :1768–1771.
Back-end-of-line compatible integration of NdFeB-based micro magnets onto 8 inch Si substrates is presented. Substrate conditioning procedures to enable further processing in a cleanroom environment are discussed. It is shown that permanent magnetic structures with lateral dimensions between 25μm and 2000μm and a depth up to 500μm can be fabricated reliably and reproducibly with a remanent magnetization of 340mT at a standard deviation as low as 5% over the substrate. To illustrate post-processing capabilities, the fabrication of micro magnet arrangements embedded in silicon frames is described.