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National Science Foundation

Cyber-Physical Systems Virtual Organization

Read-only archive of site from September 29, 2023.

CPS-VO

Chlorine

biblio

Visible to the public A Study on the Hf0.5Zr0.5O2 Ferroelectric Capacitors fabricated with Hf and Zr Chlorides

Submitted by grigby1 on Fri, 03/17/2023 - 12:19pm
  • pubcrawl
  • Resiliency
  • composability
  • resilience
  • Capacitors
  • Temperature measurement
  • remanence
  • Ferroelectric films
  • Chlorine
  • Films
  • Semiconductor device measurement
  • Zirconium

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