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Cyber-Physical Systems Virtual Organization
Read-only archive of site from September 29, 2023.
CPS-VO
Ferroelectric films
biblio
A Study on the Hf0.5Zr0.5O2 Ferroelectric Capacitors fabricated with Hf and Zr Chlorides
Submitted by grigby1 on Fri, 03/17/2023 - 11:19am
pubcrawl
Resiliency
composability
resilience
Capacitors
Temperature measurement
remanence
Ferroelectric films
Chlorine
Films
Semiconductor device measurement
Zirconium
biblio
Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability
Submitted by grigby1 on Fri, 03/17/2023 - 11:18am
pubcrawl
Resiliency
composability
resilience
Capacitors
MFM
remanence
Fatigue
Crystallization
Ferroelectric
Ferroelectric films
Hafnium Oxide
laser anneal
Rapid thermal annealing
Rapid thermal processing
Semiconductor device reliability
