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Novel techniques in micro-fabrication are integrated with geometric-based motion planning techniques to dramatically change the fundamental capabilities in applications as diverse as noninvasive surgical procedures and nano-scale manufacturing. This integration is achieved through the development of a closed-loop process that informs mechanical design via geometric modeling, constructs prototype systems across different physical scales, and conducts experimental trials to validate results.

The advanced development of cyber-physical systems at the sub-millimeter scale will have a large impact on a diverse set of potential applications. For example, targeted drug delivery or materials conveyance for micro-scale construction are two application areas that will greatly benefit from reliable microsystems. However, conventional actuator, sensor, and computational units are generally not available at extremely small scales.