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Cyber-Physical Systems Virtual Organization
Read-only archive of site from September 29, 2023.
CPS-VO
high electromechanical coupling
biblio
Single Crystalline Scandium Aluminum Nitride: An Emerging Material for 5G Acoustic Filters
Submitted by aekwall on Mon, 01/13/2020 - 12:07pm
Si
material candidate
next generation wireless communication devices
operation frequencies
Piezoelectric devices
piezoelectric material needs
Q-factor
quality factors
RF front-end
SC
scandium
scandium compounds
Scandium Doping
semiconductor growth
III-V semiconductors
Single Crystalline
single-crystal
size 400.0 nm
sputter deposition
sputtering techniques
steep skirts
sub-micron ranges
surface acoustic wave devices
thin films
ultra-thin films
wide band gap semiconductors
acoustic coupling
bulk acoustic wave resonators
Resiliency
Human behavior
pubcrawl
5G mobile communication
piezoelectric materials
5G acoustic filters
5G resonators
acoustic filters
acoustic resonators
AlN
aluminium compounds
Aluminum Nitride
bulk acoustic wave devices
Scalability
electromechanical coupling
emerging material
Film bulk acoustic resonators
film thickness
filter bandwidth
filtering applications
form factor
frequency 3.0 GHz to 10.0 GHz
high crystal quality
high electromechanical coupling
high-performance filters
high-quality single-crystalline
