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Cyber-Physical Systems Virtual Organization
Read-only archive of site from September 29, 2023.
CPS-VO
Aluminum Nitride
biblio
A Review of the Approaches to Improve The Effective Coupling Coefficient of AlN based RF MEMS Resonators
Submitted by aekwall on Mon, 12/21/2020 - 1:33pm
micromechanical resonators
vertical wave
two-dimensional lateral wave
RF MEMS resonators
RF MEMS
Resonator filters
resonator
radiofrequency filters
piezoelectric MEMS resonators
Optical filters
nonbulk acoustic wave aluminum nitride
Lateral wave
III-V semiconductor materials
effective coupling coefficient
communication applications
2D lateral wave
Scalability
acoustic coupling
Resonators
crystal resonators
Couplings
Aluminum Nitride
wide band gap semiconductors
III-V semiconductors
bulk acoustic wave devices
aluminium compounds
AlN
acoustic resonators
Micromechanical devices
pubcrawl
Human behavior
Resiliency
biblio
On the Coupling Coefficient of ScyAl1-yN-based Piezoelectric Acoustic Resonators
Submitted by aekwall on Mon, 01/13/2020 - 12:07pm
cross-sectional-Lamé-mode
acoustic coupling
ScyAl1-yN
scandium doping concentrations
scandium
Resonators
piezoelectric acoustic resonator
lithographically defined resonators
Lamb Wave Theory.
Films
film-bulk-acoustic-resonators
FBARs
FBAR
electromechanical coupling coefficient
doping profiles
crystal resonators
Scalability
Couplings
CLMRs
CLMR
aluminum scandium nitride
scandium compounds
bulk acoustic wave devices
Aluminum Nitride
aluminium compounds
acoustic resonators
Film bulk acoustic resonators
Market research
pubcrawl
Human behavior
Resiliency
biblio
Single Crystalline Scandium Aluminum Nitride: An Emerging Material for 5G Acoustic Filters
Submitted by aekwall on Mon, 01/13/2020 - 12:07pm
Si
material candidate
next generation wireless communication devices
operation frequencies
Piezoelectric devices
piezoelectric material needs
Q-factor
quality factors
RF front-end
SC
scandium
scandium compounds
Scandium Doping
semiconductor growth
III-V semiconductors
Single Crystalline
single-crystal
size 400.0 nm
sputter deposition
sputtering techniques
steep skirts
sub-micron ranges
surface acoustic wave devices
thin films
ultra-thin films
wide band gap semiconductors
acoustic coupling
bulk acoustic wave resonators
Resiliency
Human behavior
pubcrawl
5G mobile communication
piezoelectric materials
5G acoustic filters
5G resonators
acoustic filters
acoustic resonators
AlN
aluminium compounds
Aluminum Nitride
bulk acoustic wave devices
Scalability
electromechanical coupling
emerging material
Film bulk acoustic resonators
film thickness
filter bandwidth
filtering applications
form factor
frequency 3.0 GHz to 10.0 GHz
high crystal quality
high electromechanical coupling
high-performance filters
high-quality single-crystalline
