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Cyber-Physical Systems Virtual Organization
Read-only archive of site from September 29, 2023.
CPS-VO
magnetic MEMS
biblio
A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps
Submitted by grigby1 on Fri, 03/17/2023 - 11:18am
pubcrawl
Resiliency
composability
resilience
actuators
Bidirectional control
Magnetic flux
remanence
FePt Thick Film
Magnetic Actuator
magnetic devices
Magnetic films
magnetic MEMS
Micropump
Micropumps
thick films
biblio
Integrated High Power Micro Magnets for MEMS Sensors and Actuators
Submitted by aekwall on Mon, 02/24/2020 - 9:55am
neodymium alloys
integrated high power micromagnets
iron alloys
magnetic MEMS
Magnetic separation
MEMS sensors
Micro magnets
microactuators
micromagnet arrangements
elemental semiconductors
permanent magnetic structures
remanent magnetization
Si-NdFeB
silicon frames
size 25.0 mum to 2000.0 mum
size 8.0 inch
substrate conditioning procedures
Resiliency
cleanroom environment
boron alloys
back-end-of-line compatible integration
Permanent magnets
Micromechanical devices
magnetic resonance imaging
Substrates
Surface treatment
Silicon
Magnetic flux
remanence
Compositionality
Resists
microsensors
pubcrawl
