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Cyber-Physical Systems Virtual Organization
Read-only archive of site from September 29, 2023.
CPS-VO
size 25.0 mum to 2000.0 mum
biblio
Integrated High Power Micro Magnets for MEMS Sensors and Actuators
Submitted by aekwall on Mon, 02/24/2020 - 9:55am
neodymium alloys
integrated high power micromagnets
iron alloys
magnetic MEMS
Magnetic separation
MEMS sensors
Micro magnets
microactuators
micromagnet arrangements
elemental semiconductors
permanent magnetic structures
remanent magnetization
Si-NdFeB
silicon frames
size 25.0 mum to 2000.0 mum
size 8.0 inch
substrate conditioning procedures
Resiliency
cleanroom environment
boron alloys
back-end-of-line compatible integration
Permanent magnets
Micromechanical devices
magnetic resonance imaging
Substrates
Surface treatment
Silicon
Magnetic flux
remanence
Compositionality
Resists
microsensors
pubcrawl
