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National Science Foundation

Cyber-Physical Systems Virtual Organization

Read-only archive of site from September 29, 2023.

CPS-VO

Hafnium Oxide

biblio

Visible to the public Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability

Submitted by grigby1 on Fri, 03/17/2023 - 12:18pm
  • pubcrawl
  • Resiliency
  • composability
  • resilience
  • Capacitors
  • MFM
  • remanence
  • Fatigue
  • Crystallization
  • Ferroelectric
  • Ferroelectric films
  • Hafnium Oxide
  • laser anneal
  • Rapid thermal annealing
  • Rapid thermal processing
  • Semiconductor device reliability

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