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Cyber-Physical Systems Virtual Organization
Read-only archive of site from September 29, 2023.
CPS-VO
Rapid thermal processing
biblio
Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability
Submitted by grigby1 on Fri, 03/17/2023 - 11:18am
pubcrawl
Resiliency
composability
resilience
Capacitors
MFM
remanence
Fatigue
Crystallization
Ferroelectric
Ferroelectric films
Hafnium Oxide
laser anneal
Rapid thermal annealing
Rapid thermal processing
Semiconductor device reliability
