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Cyber-Physical Systems Virtual Organization

Read-only archive of site from September 29, 2023.

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electromechanical coupling coefficient

biblio

Visible to the public On the Coupling Coefficient of ScyAl1-yN-based Piezoelectric Acoustic Resonators

Submitted by aekwall on Mon, 01/13/2020 - 12:07pm
  • cross-sectional-Lamé-mode
  • acoustic coupling
  • ScyAl1-yN
  • scandium doping concentrations
  • scandium
  • Resonators
  • piezoelectric acoustic resonator
  • lithographically defined resonators
  • Lamb Wave Theory.
  • Films
  • film-bulk-acoustic-resonators
  • FBARs
  • FBAR
  • electromechanical coupling coefficient
  • doping profiles
  • crystal resonators
  • Scalability
  • Couplings
  • CLMRs
  • CLMR
  • aluminum scandium nitride
  • scandium compounds
  • bulk acoustic wave devices
  • Aluminum Nitride
  • aluminium compounds
  • acoustic resonators
  • Film bulk acoustic resonators
  • Market research
  • pubcrawl
  • Human behavior
  • Resiliency

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