Skip to Main Content Area
CPS-VO
Contact Support
Browse
Calendar
Announcements
Repositories
Groups
Search
Search for Content
Search for a Group
Search for People
Search for a Project
Tagcloud
› Go to login screen
Not a member?
Click here to register!
Forgot username or password?
Cyber-Physical Systems Virtual Organization
Read-only archive of site from September 29, 2023.
CPS-VO
crystal resonators
biblio
A Review of the Approaches to Improve The Effective Coupling Coefficient of AlN based RF MEMS Resonators
Submitted by aekwall on Mon, 12/21/2020 - 1:33pm
micromechanical resonators
vertical wave
two-dimensional lateral wave
RF MEMS resonators
RF MEMS
Resonator filters
resonator
radiofrequency filters
piezoelectric MEMS resonators
Optical filters
nonbulk acoustic wave aluminum nitride
Lateral wave
III-V semiconductor materials
effective coupling coefficient
communication applications
2D lateral wave
Scalability
acoustic coupling
Resonators
crystal resonators
Couplings
Aluminum Nitride
wide band gap semiconductors
III-V semiconductors
bulk acoustic wave devices
aluminium compounds
AlN
acoustic resonators
Micromechanical devices
pubcrawl
Human behavior
Resiliency
biblio
On the Coupling Coefficient of ScyAl1-yN-based Piezoelectric Acoustic Resonators
Submitted by aekwall on Mon, 01/13/2020 - 12:07pm
cross-sectional-Lamé-mode
acoustic coupling
ScyAl1-yN
scandium doping concentrations
scandium
Resonators
piezoelectric acoustic resonator
lithographically defined resonators
Lamb Wave Theory.
Films
film-bulk-acoustic-resonators
FBARs
FBAR
electromechanical coupling coefficient
doping profiles
crystal resonators
Scalability
Couplings
CLMRs
CLMR
aluminum scandium nitride
scandium compounds
bulk acoustic wave devices
Aluminum Nitride
aluminium compounds
acoustic resonators
Film bulk acoustic resonators
Market research
pubcrawl
Human behavior
Resiliency
