| Title | On the Coupling Coefficient of ScyAl1-yN-based Piezoelectric Acoustic Resonators |
| Publication Type | Conference Paper |
| Year of Publication | 2019 |
| Authors | Zhao, Xuanyi, Cassella, Cristian |
| Conference Name | 2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC) |
| Keywords | acoustic coupling, acoustic resonators, aluminium compounds, Aluminum Nitride, aluminum scandium nitride, bulk acoustic wave devices, CLMR, CLMRs, Couplings, cross-sectional-Lamé-mode, crystal resonators, doping profiles, electromechanical coupling coefficient, FBAR, FBARs, Film bulk acoustic resonators, film-bulk-acoustic-resonators, Films, Human Behavior, Lamb Wave Theory., lithographically defined resonators, Market research, piezoelectric acoustic resonator, pubcrawl, Resiliency, Resonators, Scalability, scandium, scandium compounds, scandium doping concentrations, ScyAl1-yN |
| Abstract | This work investigates the electromechanical coupling coefficient (kt2) attained by two available piezoelectric acoustic resonator technologies relying on Aluminum Scandium Nitride (ScyAl1-yN) films to operate. In particular, by using a theoretical approach, we extracted the maximum kt2-value attainable, for different scandium-doping concentrations (from 0% to 40%), by Film-Bulk-Acoustic-Resonators (FBARs) and Cross-Sectional-Lame-Mode Resonators (CLMRs). For the first time, we show how the use of higher scandium doping concentrations can render the kt2 of CLMRs higher (35%) than the one attained by FBARs (28%). Such a unique feature renders CLMRs as ideal candidates to form lithographically defined resonators and filters for next-generation wideband radiofrequency (RF) front-ends. |
| DOI | 10.1109/FCS.2019.8856086 |
| Citation Key | zhao_coupling_2019 |
On the Coupling Coefficient of ScyAl1-yN-based Piezoelectric Acoustic Resonators