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Cyber-Physical Systems Virtual Organization
Read-only archive of site from September 29, 2023.
CPS-VO
micromechanical resonators
biblio
A Review of the Approaches to Improve The Effective Coupling Coefficient of AlN based RF MEMS Resonators
Submitted by aekwall on Mon, 12/21/2020 - 1:33pm
micromechanical resonators
vertical wave
two-dimensional lateral wave
RF MEMS resonators
RF MEMS
Resonator filters
resonator
radiofrequency filters
piezoelectric MEMS resonators
Optical filters
nonbulk acoustic wave aluminum nitride
Lateral wave
III-V semiconductor materials
effective coupling coefficient
communication applications
2D lateral wave
Scalability
acoustic coupling
Resonators
crystal resonators
Couplings
Aluminum Nitride
wide band gap semiconductors
III-V semiconductors
bulk acoustic wave devices
aluminium compounds
AlN
acoustic resonators
Micromechanical devices
pubcrawl
Human behavior
Resiliency
biblio
Investigating Long-Term Stability of Wide Bandwidth Surface Acoustic Waves Gyroscopes Using a Monolithically Integrated Micro-Oven
Submitted by aekwall on Mon, 12/21/2020 - 1:32pm
gyroscope
wide bandwidth Surface Acoustic waves Gyroscopes
tightly couples frequency-based temperature detection
thermal control
temperature 10.0 muK
SAWG resonance frequency
Piezoelectric
ovenized control system
ovenization
monolithically integrated microoven
monolithic integration
micromechanical resonators
MEMS-based gyroscopes
long-term stability
Inertial sensor
gyroscopes
Scalability
Frequency Stabilization
frequency stability
Surface acoustic waves
lithium compounds
Micromechanical devices
MEMS
SAW
acoustic coupling
surface acoustic wave sensors
surface acoustic wave devices
microsensors
pubcrawl
Human behavior
Resiliency
