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Cyber-Physical Systems Virtual Organization
Read-only archive of site from September 29, 2023.
CPS-VO
RF MEMS resonators
biblio
A Review of the Approaches to Improve The Effective Coupling Coefficient of AlN based RF MEMS Resonators
Submitted by aekwall on Mon, 12/21/2020 - 1:33pm
micromechanical resonators
vertical wave
two-dimensional lateral wave
RF MEMS resonators
RF MEMS
Resonator filters
resonator
radiofrequency filters
piezoelectric MEMS resonators
Optical filters
nonbulk acoustic wave aluminum nitride
Lateral wave
III-V semiconductor materials
effective coupling coefficient
communication applications
2D lateral wave
Scalability
acoustic coupling
Resonators
crystal resonators
Couplings
Aluminum Nitride
wide band gap semiconductors
III-V semiconductors
bulk acoustic wave devices
aluminium compounds
AlN
acoustic resonators
Micromechanical devices
pubcrawl
Human behavior
Resiliency
