Visible to the public High Overtone Bulk Acoustic Resonator with improved effective coupling coefficient

TitleHigh Overtone Bulk Acoustic Resonator with improved effective coupling coefficient
Publication TypeConference Paper
Year of Publication2022
AuthorsChedurupalli, Shivakumar, Karthik Reddy, K, Akhil Raman, T S, James Raju, K.C
Conference Name2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF)
Keywordsacoustic coupling, Acoustic measurements, Analytical models, BST, Capacitance, coupling coefficient, Couplings, Electrodes, High Overtone Bulk Acoustic Resonator, Human Behavior, Impedance measurement, pubcrawl, resilience, Resiliency, Resonant frequency, Scalability
AbstractA High Overtone Bulk Acoustic Wave Resonator (HBAR) is fabricated with the active material being Ba0.5Sr0.5TiO3 (BST). Owing to its strong electrostrictive property, the BST needs an external dc voltage to yield an electromechanical coupling. The variations in resonances with respect to varying dc fields are noted and analyzed with the aid of an Resonant Spectrum Method (RSM) model. Effective coupling coefficient \$(\textbackslashmathrmK\_\textbackslashmathrme\textbackslashmathrmf\textbackslashmathrmf^2(%))\$ in the case of employed MIM based structure is observed and the comparisons are drawn with the corresponding values of the CPC structures. An improvement of 70% in the value of \$\textbackslashmathrmK\_\textbackslashmathrme\textbackslashmathrmf\textbackslashmathrmf^2\$(%)at 1.34 GHz is witnessed in MIM structures because of direct access to the bottom electrode of the structure.
DOI10.1109/ISAF51494.2022.9870132
Citation Keychedurupalli_high_2022