Biblio
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A Study on the Hf0.5Zr0.5O2 Ferroelectric Capacitors fabricated with Hf and Zr Chlorides. 2022 China Semiconductor Technology International Conference (CSTIC). :1–3.
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2022. Ferroelectric capacitor memory devices with carbon-free Hf0.5Zr0.5O2 (HZO) ferroelectric films are fabricated and characterized. The HZO ferroelectric films are deposited by ALD at temperatures from 225 to 300°C, with HfCl4 and ZrCl4 as the precursors. Residual chlorine from the precursors is measured and studied systematically with various process temperatures. 10nm HZO films with optimal ALD growth temperature at 275°C exhibit remanent polarization of 25µC/cm2 and cycle endurance of 5×1011. Results will be compared with those from HZO films deposited with carbon containing metal-organic precursors.
Effect of multilayer structure on energy storage characteristics of PVDF ferroelectric polymer. 2022 4th International Conference on Intelligent Control, Measurement and Signal Processing (ICMSP). :582–586.
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2022. Dielectric capacitors have attracted attention as energy storage devices that can achieve rapid charge and discharge. But the key to restricting its development is the low energy storage density of dielectric materials. Polyvinylidene fluoride (PVDF), as a polymer with high dielectric properties, is expected to improve the energy storage density of dielectric materials. In this work, the multilayer structure of PVDF ferroelectric polymer is designed, and the influence of the number of layers on the maximum polarization, remanent polarization, applied electric field and energy storage density of the dielectric material is studied. The final obtained double-layer PVDF obtained a discharge energy storage density of 10.6 J/cm3 and an efficiency of 49.1% at an electric field of 410 kV/mm; the three-layer PVDF obtained a discharge energy storage density of 11.0 J/cm3 and an efficiency of 37.2% at an electric field of 440 kV/mm.
Monte Carlo Study of Jiles-Atherton Parameters on Hysteresis Area and Remnant Displacement. 2022 IEEE 31st International Symposium on Industrial Electronics (ISIE). :1017–1022.
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2022. In this study, the parameters of the Jiles-Atherton (JA) model are investigated to determine suitable solution candidates for hysteresis models of a piezoelectric actuator (PEA). The methodology of this study is to perform Monte Carlo experiments on the JA model by randomly selecting parameters that generate hysteresis curves. The solution space is then restrained such that their normalized area and remnant displacements are comparable to those of the PEA. The data resulting from these Monte Carlo simulations show trends in the parameter space that can be used to further restrain parameter selection windows to find suitable JA parameters to model PEAs. In particular, the results show that selection of the reversibility coefficient and the pinning factor strongly affect both of the hysteresis characteristics studied. A large density of solutions is found in certain parameter distributions for both the area and the remnant displacement, but the remnant displacement generates the densest distributions. These results can be used to more effectively find suitable hysteresis models for modeling purposes.
ISSN: 2163-5145
Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability. 2022 IEEE International Memory Workshop (IMW). :1–4.
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2022. Study on the effect of nanosecond laser anneal (NLA) induced crystallization of ferroelectric (FE) Si-doped hafnium oxide (HSO) material is reported. The laser energy density (0.3 J/cm2 to 1.3 J/cm2) and pulse count (1.0 to 30) variations are explored as pathways for the HSO based metal-ferroelectric-metal (MFM) capacitors. The increase in energy density shows transition toward ferroelectric film crystallization monitored by the remanent polarization (2Pr) and coercive field (2Ec). The NLA conditions show maximum 2Pr (\$\textbackslashsim 24\textbackslash \textbackslashmu\textbackslashmathrmC/\textbackslashtextcmˆ2\$) comparable to the values obtained from reference rapid thermal processing (RTP). Reliability dependence in terms of fatigue (107 cycles) of MFMs on NLA versus RTP crystallization anneal is highlighted. The NLA based MFMs shows improved fatigue cycling at high fields for the low energy densities compared to an RTP anneal. The maximum fatigue cycles to breakdown shows a characteristic dependence on the laser energy density and pulse count. Leakage current and dielectric breakdown of NLA based MFMs at the transition of amorphous to crystalline film state is reported. The role of NLA based anneal on ferroelectric film crystallization and MFM stack reliability is reported in reference with conventional RTP based anneal.
ISSN: 2573-7503
Direct-Drive Wind Generator Concept with Non-Rare-Earth PM Flux Intensifying Stator and Reluctance Outer Rotor. 2022 11th International Conference on Renewable Energy Research and Application (ICRERA). :582–587.
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2022. This paper proposes a novel concept for an electric generator in which both ac windings and permanent magnets (PMs) are placed in the stator. Concentrated windings with a special pattern and phase coils placed in separate slots are employed. The PMs are positioned in a spoke-type field concentrating arrangement, which provides high flux intensification and enables the use of lower remanence and energy non-rare earth magnets. The rotor is exterior to the stator and has a simple and robust reluctance-type configuration without any active electromagnetic excitation components. The principle of operation is introduced based on the concept of virtual work with closed-form analytical airgap flux density distributions. Initial and parametric design studies were performed using electromagnetic FEA for a 3MW direct-drive wind turbine generator employing PMs of different magnetic remanence and specific energy. Results include indices for the goodness of excitation and the goodness of the electric machine designs; loss; and efficiency estimations, indicating that performance comparable to PM synchronous designs employing expensive and critical supply rare-earth PMs may be achieved with non-rare earth PMs using the proposed configuration.
ISSN: 2572-6013
A Magnetic Actuator Using PLD-made FePt Thick Film as a Permanent Magnet and Membrane Material for Bi-directional Micropumps. 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS). :309–310.
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2022. This paper proposes a magnetic actuator using a partially magnetized FePt thick film as a permanent magnet and membrane material for bi-directional micropumps. The magnetized areas act as flux sources, while the magnetized and unmagnetized areas play a role of the membrane part. The mechanical and magnetic characterization results show FePt has a large tensile strength and a lower Young’s modulus than Si crystal, and a comparable remanence to NdFeB. A magnetic pattern transfer technique with a post thermal demagnetization is proposed and experimentally verified to magnetize the FePt partially. Using the proposed magnetic actuator with partially magnetized FePt film is beneficial to simplify the complicated structure and fabrication process of the bi-directional magnetic micropump besides other magnetic MEMS devices.
On the Mitigation of Leakage Flux in Spoke Type Permanent Magnet Synchronous Machines. 2022 International Conference on Electrical Machines (ICEM). :302–308.
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2022. The use of rare-earth elements in permanent magnets rises economic, environmental and supply-chain related concerns. Instead, ferrite magnets have been researched as an alternative. The magnetic flux concentration capacity of the Spoke Type Permanent Magnet Synchronous Motor (PMSM) and the low magnetic remanence of the ferrite magnet make them complementary strategies towards the desirable performance. However, if restricted to conventional manufacturing processes and materials, the mechanical design is a challenging step of the development of these machines. This paper explores how mechanical constraints impact electromagnetic performance. To access the interdependency of the performance and the mechanical constraints, finite element analyses are done both in the mechanical and electromagnetic domain. The results show that the mechanical constraints have an impact on the performance, although it is possible to reduce it by adapting the design to the electromagnetic and mechanical properties of the electrical steel.
ISSN: 2381-4802
Magnetic properties and optimization of AlNiCo fabricated by additive manufacturing. 2022 IEEE 17th Conference on Industrial Electronics and Applications (ICIEA). :354–358.
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2022. In this paper, we use selective laser melting (SLM) technology to fabricate AlNiCo magnetic materials, and the effects of laser processing parameters on the density and mechanical properties of AlNiCo magnetic materials were studied. We tested the magnetic properties of the heat-treated magnets. The results show that both laser power and scanning speed affect the forming. In this paper, the influence of laser power on the density of samples far exceeds the scanning speed. Through the experiment, we obtained the optimal range of process parameters: laser power (150 170W) and laser scanning speed (800 1000mm/s). Although the samples formed within this range have higher density, there are still many cracks, further research work should be done.
ISSN: 2158-2297
Magnetic evidence for lightning strikes on mountains in Lesotho as an important denudation agent. 2022 36th International Conference on Lightning Protection (ICLP). :500–503.
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2022. Contrary to previous opinion, ‘frost shattering’ is not the only major contributor to rock weathering at mid latitudes and high elevations, more specifically along edges of bedrock escarpments. Lightning is also a significant contributor to land surface denudation. We can show this as lightning strikes on outcrops can dramatically alter the magnetic signature of rocks and is one of the main sources of noise in paleomagnetic studies. Igneous rocks in the highlands of Lesotho, southern Africa (\textgreater 3000 m elevation) provide an ideal study location, as flow lavas remain as prominent ridges that are relatively resistant to weathering. It is well known that lightning strikes can cause large remanent magnetization in rocks with little resultant variation in susceptibility. At two adjoining peaks in the Lesotho highlands, mapped freshly fractured rock correlates with areas of high magnetic intensity (remanent component), but little variation in susceptibility (related to the induced field), and is therefore a clear indicator of lightning damage. The majority of these mapped strike sites occur at the edges of topographic highs. Variations in magnetic intensity are correlated with the much lower resolution national lightning strikes dataset. These data confirm that high elevation edges of peak scarps are the focus of previous lightning strikes. This method of magnetic surveying compared with lightning strike data is a new method of confirming the locations of lightning strikes, and reduces the need for intensive paleomagnetic studies of the area to confirm remanence.
3-Axis Force Estimation of a Soft Skin Sensor using Permanent Magnetic Elastomer (PME) Sheet with Strong Remanence. 2022 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM). :302–307.
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2022. This paper describes a prototype of a novel Permanent Magnetic Elastomer (PME) sheet based skin sensor for robotic applications. Its working principle is to use a Hall effect transducer to measure the change of magnetic field. PME is a polymer that has Neodymium particles distributed inside it, after strong magnetization for anisotropy, the PME acquires strong remanent magnetization that can be comparable to that of a permanent magnet, in this work, we made improvement of the strength of the magnetic field of PME, so it achieved magnetic strength as high as 25 mT when there is no deformation. When external forces apply on the sensor, the deformation of PME causes a change in the magnetic field due to the change in the alignment of the magnetic particles. Compared with other soft magnetic sensors that employ similar technology, we implemented linear regression method to simplify the calibration, so we focus on the point right above the magnetometer. An MLX90393 chip is installed at the bottom of the PME as the magnetometer. Experimental results show that it can measure forces from 0.01–10 N. Calibration is confirmed effective even for shear directions when the surface of PME is less than 15 x 15 mm.
ISSN: 2159-6255
The Behaviour of Magnetic Properties and Electromagnetic Absorption of MgFe2O4 prepared by Powder Metallurgy Method. 2021 International Conference on Radar, Antenna, Microwave, Electronics, and Telecommunications (ICRAMET). :136–140.
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2021. This study focuses on the behavior of magnetic properties and electromagnetic absorption of MgFe2O4 prepared by powder metallurgy. Magnesium ferrite was synthesized using oxide precursors (MgO and Fe2 O3). The samples were calcined at 700 °C for 3 hours and sintered at 1100 °C for 24 hours with varying compaction pressure (80 kg/cm2, 90 kg/cm2, 100 kg/cm2). Magnesium ferrites were characterized using an X-Ray Diffraction (XRD) for their crystal structure analysis, a Scanning Electron Microscope equipped with an Energy Dispersive Spectroscopy (SEM-EDS) for their microstructure and elemental composition studies, a Permagraph for their magnetic properties, and a Vector Network Analysis (VNA) for their microwave absorption characteristics. XRD patterns shows primary phase of MgFe2O4 and secondary phase of Fe2 O3 present in all three samples. The SEM characterization reveal the microstructure of magnesium ferrite and the EDS spectra confirm the presence of Fe, Mg, and O. The hysteresis curves show that the values of remanence magnetic induction (Br) are 17.5 emu/g, 16.5 emu/g, and 14.5 emu/g, respective to the increasing compaction pressure. Saturation magnetization values are increasing whereas the coercivity values are found to have inconsistent change with increasing compaction pressure. According to VNA results, the values of reflection loss are -16.15 dB, -22.45 dB, and -27.55 dB, respectively.
The Engineering Practical Calculation Method of Circulating Current in YD-connected Transformer. 2021 IEEE 2nd China International Youth Conference on Electrical Engineering (CIYCEE). :1–5.
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2021. The circulating current in the D-winding may cause primary current waveform distortion, and the reliability of the restraint criterion based on the typical magnetizing inrush current characteristics will be affected. The magnetizing inrush current with typical characteristics is the sum of primary current and circulating current. Using the circulating current to compensate the primary current can improve the reliability of the differential protection. When the phase is not saturated, the magnetizing inrush current is about zero. Therefore, the primary current of unsaturated phase can be replaced by the opposite of the circulating current. Based on this, an engineering practical calculation method for circulating current is proposed. In the method, the segmented primary currents are used to replace the circulating current. Phasor analysis is used to demonstrate the application effect of this method when remanence coefficients are different. The method is simple and practical, and has strong applicability and high reliability. Simulation and recorded waveforms have verified the effectiveness of the method.
Identification of Transformer Magnetizing Inrush Current Based on Empirical Mode Decomposition. 2021 IEEE 4th International Electrical and Energy Conference (CIEEC). :1–6.
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2021. Aiming at the fact that the existing feature quantities cannot well identify the magnetizing inrush current during remanence and bias and the huge number of feature quantities, a new identification method using empirical mode decomposition energy index and artificial intelligence algorithm is proposed in 'this paper. Decomposition and denoising are realized through empirical mode decomposition, and then the corresponding energy index is obtained for the waveform of each inherent modal component and simplified by the mean impact value method. Finally, the accuracy of prediction using artificial intelligence algorithm is close to 100%. This reflects the practicality of the method proposed in 'this article.
Analysis of zero-mode inrush current characteristics of converter transformers. 2021 56th International Universities Power Engineering Conference (UPEC). :1–6.
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2021. In recent years, there have been situations in which the zero-sequence protection of the transformer has been incorrectly operated due to the converter transformer energizing or fault recovery. For converter transformers, maloperation may also occur. However, there is almost no theoretical research on the zero-mode inrush currents of converter transformers. This paper studies the characteristics of the zero-mode inrush currents of the converter transformers, including the relationship between the amplitude and attenuation characteristics of the zero-mode inrush currents of converter transformers, and their relationship with the system resistance, remanence, and closing angle. First, based on the T-type equivalent circuit of the transformer, the equivalent circuit of the zero-mode inrush current of each transformer is obtained. On this basis, the amplitude relationship of the zero-mode inrush currents of different converter transformers is obtained: the zero-mode inrush current of the energizing pole YY transformer becomes larger than the YD transformer, the energized pole YD becomes greater than the YY transformer, and the YY transformer zero-mode inrush current rises from 0. It is also analyzed that the sympathetic interaction will make the attenuation of the converter transformer zero-mode inrush current slower. The system resistance mainly affects the initial attenuation speed, and the later attenuation speed is mainly determined by the converter transformer leakage reactance. Finally, PSCAD modeling and simulation are carried out to verify the accuracy of the theoretical analysis.
Research on Automatic Demagnetization for Cylindrical Magnetic Shielding. 2021 IEEE 4th International Electrical and Energy Conference (CIEEC). :1–6.
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2021. Magnetic shielding is an important part in atomic clock’s physical system. The demagnetization of the assembled magnetic shielding system plays an important role in improving atomic clock’s performance. In terms of the drawbacks in traditional attenuated alternating-current demagnetizing method, this paper proposes a novel method — automatically attenuated alternating-current demagnetizing method. Which is implemented by controlling the demagnetization current waveform thorough the signal source’s modulation, so that these parameters such as demagnetizing current frequency, amplitude, transformation mode and demagnetizing period are precisely adjustable. At the same time, this demagnetization proceeds automatically, operates easily, and works steadily. We have the pulsed optically pumped (POP) rubidium atomic clock’s magnetic shielding system for the demagnetization experiment, the magnetic field value reached 1nT/7cm. Experiments show that novel method can effectively realize the demagnetization of the magnetic shielding system, and well meets the atomic clock’s working requirements.
Impact of mechanical strain on wakeup of HfO2 ferroelectric memory. 2021 IEEE International Reliability Physics Symposium (IRPS). :1–6.
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2021. This work investigates the impact of mechanical strain on wake-up behavior of planar HfO2 ferroelectric capacitor-based memory. External in-plane strain was applied using a four-point bending tool and strain impact on remanent polarization and coercive voltage of the ferroelectric was monitored. It was established that compressive strain is beneficial for 2Pr improvement, while tensile strain leads to its degradation, with a sensitivity of -8.4 ± 0.5 % per 0.1 % of strain. Strain-induced polarization rotation is considered to be the most likely mechanism affecting 2Pr At the same time, no strain impact on Vcwas observed in the investigated strain range. The results seen here can be utilized to undertake stress engineering of ferroelectric memory in order to improve its performance.
Low-Temperature Attacks Against Digital Electronics: A Challenge for the Security of Superconducting Modules in High-Speed Magnetic Levitation (MagLev) Trains. 2021 IEEE 14th Workshop on Low Temperature Electronics (WOLTE). :1–4.
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2021. This work examines volatile memory modules as ephemeral key storage for security applications in the context of low temperatures. In particular, we note that such memories exhibit a rising level of data remanence as the temperature decreases, especially for temperatures below 280 Kelvin. Therefore, these memories cannot be used to protect the superconducting modules found in high-speed Magnetic Levitation (MagLev) trains, as such modules most often require extremely low temperatures in order to provide superconducting applications. Thus, a novel secure storage solution is required in this case, especially within the oncoming framework concept of the internet of railway things, which is partially based on the increasing utilisation of commercial off-the-shelf components and potential economies of scale, in order to achieve cost efficiency and, thus, widespread adoption. Nevertheless, we do note that volatile memory modules can be utilised as intrinsic temperature sensors, especially at low temperatures, as the data remanence they exhibit at low temperatures is highly dependent on the ambient temperature, and can, therefore, be used to distinguish between different temperature levels.
Factors influencing CT saturation and its implications on Distance Protection Scheme-Analysis and Testing. 2021 74th Conference for Protective Relay Engineers (CPRE). :1–11.
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2021. The behavior of the Current Transformer (CTs) is of utmost importance for protection engineers to ensure reliable operation of power system. CT magnetic saturation is a well-known phenomenon when analyzing its performance characteristics. Nevertheless, transient conditions in the system might be different every time. A good understanding of the magnetic saturation of different CT designs and the effect of saturation on the protection schemes is imperative for developing a robust and dependable protection system. In this paper, various factors that affect CT saturation like X/R ratio, large current magnitudes, DC offset, burden and magnetization remanence are discussed. Analysis of CT saturation based on changes to burden and remanence is performed. In addition to that, the effect of saturation due to these factors on distance protection are presented with test results and analysis. Saturation conditions are analyzed on mho distance elements during phase to ground and three phase faults. Finally, a practical approach to efficiently test the performance of protection schemes under CT saturation conditions is proposed using COMTRADE play back. COMTRADE play back files for various scenarios of CT saturation conditions are generated and used for testing the performance of the protection scheme.
Unconventional magnetic hysteresis of the Josephson supercurrent in magnetic Josephson Junctions. 2021 IEEE 14th Workshop on Low Temperature Electronics (WOLTE). :1–4.
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2021. In Magnetic Josephson Junctions (MJJs) based on Superconductor-Insulator-Superconductor-Ferromagnet-Superconductor (SIS’FS), we provide evidence of an unconventional magnetic field behavior of the critical current characterized by an inverted magnetic hysteresis, i.e., an inverted shift of the whole magnetic field pattern when sweeping the external field. By thermoremanence measurements of S/F/S trilayers, we have ruled out that this uncommon behavior could be related to the F-stray fields. In principle, this finding could have a crucial role in the design and proper functioning of scalable cryogenic memories.
Material Characterization for Magnetic Soft Robots. 2021 IEEE 4th International Conference on Soft Robotics (RoboSoft). :335–342.
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2021. Magnetic soft robots are increasingly popular as they provide many advantages such as miniaturization and tetherless control that are ideal for applications inside the human body or in previously inaccessible locations.While non-magnetic elastomers have been extensively characterized and modelled for optimizing the fabrication of soft robots, a systematic material characterization of their magnetic counterparts is still missing. In this paper, commonly employed magnetic materials made out of Ecoflex™ 00-30 and Dragon Skin™ 10 with different concentrations of NdFeB microparticles were mechanically and magnetically characterized. The magnetic materials were evaluated under uniaxial tensile testing and their behavior analyzed through linear and hyperelastic model comparison. To determine the corresponding magnetic properties, we present a method to determine the magnetization vector, and magnetic remanence, by means of a force and torque load cell and large reference permanent magnet; demonstrating a high level of accuracy. Furthermore, we study the influence of varied magnitude impulse magnetizing fields on the resultant magnetizations. In combination, by applying improved, material-specific mechanical and magnetic properties to a 2-segment discrete magnetic robot, we show the potential to reduce simulation errors from 8.5% to 5.4%.
CT sizing for generator and transformer protective relays. 15th International Conference on Developments in Power System Protection (DPSP 2020). :1–6.
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2020. Modern relays often have algorithms that enhance the security of elements that are otherwise susceptible to current transformer (CT) saturation. In this paper, we consider some of the similarities and differences between IEEE and IEC guidance on CT selection. We use CT models verified using high-current tests on a physical CT. Then using these models, we determine CT sizing guidelines and relay settings for a generator and transformer differential relay. Application guidance for generator black start is provided. Considerations such as remanence are discussed.
A simulation calculation method for suppressing the magnetizing inrush current in the setting of the overcurrent protection of the connecting transformer in the hydropower station. 2020 5th International Conference on Mechanical, Control and Computer Engineering (ICMCCE). :197–202.
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2020. In order to improve the reliability of power supply in adjacent hydropower stations, the auxiliary power systems of the two stations are connected through a contact transformer. The magnetizing inrush current generated by the connecting transformer of a hydropower station has the characteristics of high frequency, strong energy, and multi-coupling. The harm caused by the connecting transformer is huge. In order to prevent misoperation during the closing process of the connecting transformer, this article aims at the problem of setting the switching current of the connecting transformer of the two hydropower stations, and establishes the analysis model of the excitation inrush current with SimPowerSystem software, and carries out the quantitative simulation calculation of the excitation inrush current of the connecting transformer. A setting strategy for overcurrent protection of tie transformers to suppress the excitation inrush current is proposed. Under the conditions of changing switch closing time, generator load, auxiliary transformer load, tie transformer core remanence, the maximum amplitude of the excitation inrush current is comprehensively judged Value, and then achieve the suppression of the excitation inrush current, and accurately determine the protection setting of the switch.
Novel Efficiency-shifting Radial-Axial Hybrid Interior Permanent Magnet Sychronous Motor for Electric Vehicle. 2020 IEEE Energy Conversion Congress and Exposition (ECCE). :47–52.
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2020. A novel efficiency-shifting radial-axial hybrid permanent magnet synchronous motor that can realize two high-efficiency regions at low and high speeds is developed to extend the maximum driving distance and track the reference speed more accurately for electric vehicle application. The motor has two stators, which are radial and axial, to rotate one shared rotor. The rotor employs two combined topologies, i.e., inner surface-inset-mounted and outer V-shaped interior-mounted. For both outer and inner permanent magnets, Nd-Fe-B, having the remanent flux density of 1.23 T and coercivity of 890 kA/m, is used. The simulation result shows that the designed motor exhibits not only high maximum torque of 400 Nm and the maximum speed of 18,000 rpm but also two high-efficiency regions of 97.6 % and 92.0 % at low and high speed, respectively. Lastly, the developed motor shows better performance than corresponding separated radial and axial permanent magnet motor.
Evaluation of the Detectability of Damper Cage Damages in Synchronous Motors through the Advanced Analysis of the Stray Flux. 2020 IEEE Energy Conversion Congress and Exposition (ECCE). :2058–2063.
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2020. The determination of the damper cage health is a matter of great importance in those industries that use large synchronous motors in their processes. In the past, unexpected damages of that element implied economic losses amounting up to several million \$. The problem is that, in the technical literature, there is a lack of non-invasive techniques enabling the reliable condition monitoring of this element. This explains the fact that, in industry, rudimentary methods are still employed to determine its condition. This paper proposes the analysis of the stray flux as a way to determine the condition of the damper cage. The paper shows that the analysis of the stray flux under starting yields characteristic time-frequency signatures of the fault components that can be used to reliably determine the condition of the damper. Moreover, the analysis of the stray flux at steady-state operation under asynchronous mode could give useful information to this end. The paper also analyses the influence of the remanent magnetism in the rotor of some synchronous motors, which can make the damper cage diagnosis more difficult; some solutions to this problem are also suggested in the paper.
Ferroelectricity Enhancement in Hf0.5Zr0.5O2 Capacitors by Incorporating Ta2O5 Dielectric Seed Layers. 2020 4th IEEE Electron Devices Technology Manufacturing Conference (EDTM). :1–3.
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2020. Recently, dielectric/ferroelectric (DE/FE) bilayer systems have been extensively investigated for achieving high remanent polarization in Hf0.5Zr0.5O2(HZO) based MFM capacitors. Herein, we report significant enhancement in the ferroelectric property of HZO capacitors by incorporating Ta2O5as the dielectric seed layer. Thickness of the Ta2O5layer was incorporated at both top and bottom of the HZO films and the thickness of the seed layer was varied from 10 to 50 Å. When the Ta2O5dielectric films were inserted at the top, the highest remanent polarization 16.83 μC/cm2 was observed in case of 20 Å films as compared to that of 13.21 μC/cm2 of the reference HZO device. Similarly, for bottom Ta2O5dielectric films, the highest remanent polarization 15.24 μC/cm2 was observed in case of 20 Å films. When we compared both the stacks, the best result was observed in case of top Ta2O5. The coercive field (Ec) was also found to be nearly same with the HZO based device despite the incorporation of the dielectric layer. The enhanced ferroelectricity of these devices can be used in memory devices, FeFETs, FTJ and sensors applications.